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J-GLOBAL ID:200902000586299788   Reference number:87A0440344

Influence of aperture illumination on the surface measurement error using radio holographic metrology.

電波ホログラフィ法を用いた鏡面精度測定に及ぼす開口照度分布の影響
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Volume: 87  Issue: 91  Page: 75-80(A.P87-29)  Publication year: Jun. 25, 1987 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Other applications of communication  ,  Other holography 
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