Art
J-GLOBAL ID：200902000859316257   Reference number：90A0029929

Generation of a microwave plasma using traveling waves.

進行波を利用したマイクロ波プラズマの発生
Author (2)：
KOMACHI K

About KOMACHI K

(Sumitomo Metal Industries, Ltd., Amagasaki, JPN)

About Sumitomo Metal Industries, Ltd., Amagasaki, JPN

, 
KOBAYASHI S

About KOBAYASHI S

(Sumitomo Metal Industries, Ltd., Amagasaki, JPN)

About Sumitomo Metal Industries, Ltd., Amagasaki, JPN


Material：
Journal of Microwave Power and Electromagnetic Energy  (Journal of Microwave Power & Electromagnetic Energy)

About Journal of Microwave Power and Electromagnetic Energy


Volume： 24  Issue： 3  Page： 140-149  Publication year： 1989 
JST Material Number： D0640A  ISSN： 0832-7823  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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plasma production

About plasma production

,...
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JST classification (1)：
JST classification
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Applications of plasma 
(BJ02110K)

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Terms in the title (2)：
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進行波

About 進行波

, 
マイクロ波プラズマ

About マイクロ波プラズマ


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