Art
J-GLOBAL ID：200902000861535870   Reference number：86A0318095

Optical detection of particle contamination on surfaces: A review.

表面上の粒子汚染の光学的検出 レビュー
Author (1)：
LILIENFELD P

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(GCA, MA)

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Material：
Aerosol Science and Technology  (Aerosol Sci Technol)

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Volume： 5  Issue： 2  Page： 145-165  Publication year： 1986 
JST Material Number： H0030B  ISSN： 0278-6826  CODEN： ASTYDQ  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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pollution

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Optical instruments and techniques in general 
(BD07010S)

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,  Applications of lasers 
(BD04100V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
粒子汚染

About 粒子汚染

, 
光学的検出

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, 
レビュー

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