Art
J-GLOBAL ID：200902001187005262
Reference number：90A0193558
Fabrication of micromechanical devices from polysilicon films with smooth surfaces.
平滑表面を持つポリシリコーンフィルムからのミクロ機械デバイスの製造
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Author (5)：
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Material：
Volume：
20
Issue：
1/2
Page：
117-122
Publication year：
Nov. 15, 1989
JST Material Number：
B0345B
ISSN：
0250-6874
Document type：
Article
Article type：
原著論文
Country of issue：
Switzerland (CHE)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Other moldings
Terms in the title (2)：
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