Art
J-GLOBAL ID：200902002350846918   Reference number：85A0286060

Fabrication technology for a chronic in-vivo pressure sensor.

長期的生体内部の圧力センサに対する製作プロセス
Author (3)：
BURNS B E

About BURNS B E

(Stanford Univ., California)

About Stanford Univ., California

, 
BARTH P W

About BARTH P W

(Stanford Univ., California)

About Stanford Univ., California

, 
ANGELL J B

About ANGELL J B

(Stanford Univ., California)

About Stanford Univ., California


Material：
Technical Digest. International Electron Devices Meeting  (IEEE International Electron Devices Meeting)

About Technical Digest. International Electron Devices Meeting


Volume： 1984  Page： 210-212  Publication year： 1984 
JST Material Number： C0829B  ISSN： 0163-1918  Document type： Proceedings
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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piezoresistance effect

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integrated circuit bonding

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Piezoelectric devices 
(NC03110I)

About Piezoelectric devices

,  Biometry 
(EL03020C)

About Biometry

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
長期

About 長期

, 
圧力センサ

About 圧力センサ

, 
製作プロセス

About 製作プロセス


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