Art
J-GLOBAL ID：200902004821823860
Reference number：89A0339360
Applications of plasma to processing of ceramics. Nitride coatings by ion plating.
セラミックスへのプラズマ利用 イオンプレーティングによる窒化物膜
Author (1)：
Material：
Volume：
24
Issue：
5
Page：
433-438
Publication year：
May. 1989
JST Material Number：
S0291A
ISSN：
0009-031X
CODEN：
SERAA7
Document type：
Article
Article type：
文献レビュー
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Ceramic coating to nonmetallic materials
, Applications of plasma
Terms in the title (4)：
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