Surface defect inspection (2) of seniconductos with patterns by the space filter method.Development and detection performance of the equipment.

MIYAZAKI YOKO; TANAKA HITOSHI; ICHIMURA HIDEO; YOSHIKAWA YUKI; KOSAKA NOBUYUKI; TOMODA TOSHIMASA

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J-GLOBAL ID：200902005499569517 Reference number：90A0881851

Surface defect inspection (2) of seniconductos with patterns by the space filter method.Development and detection performance of the equipment.

空間フィルタ法によるパターン付半導体表面欠陥検査(第2報) 装置の開発および検出性能について

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Material：
Volume： 1990 Issue： Autumn 3 Page： 947-948 Publication year： Sep. 1990
JST Material Number： Y0914A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measurement,testing and reliability of solid-state devices

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