Art
J-GLOBAL ID：200902006034989605   Reference number：92A0634425

Integrated Capacitive Accelerometer with Novel Electrostatic Force Balancing.

新しい静電力平衡型の集積容量加速度計
Author (2)：
MATSUMOTO Y

About MATSUMOTO Y

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
ESASHI M

About ESASHI M

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN


Material：
Technical Digest of the Sensor Symposium  (Proceedings of the Sensor Symposium)

About Technical Digest of the Sensor Symposium


Volume： 11th  Page： 47-50  Publication year： May. 1992 
JST Material Number： X0768A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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accelerometer

About accelerometer

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of time,speed,acceleration,angular veloc? 
(AD05040K)

About Measuring methods and instruments of time,speed,acceleration,angular veloc?

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
静電力

About 静電力

, 
集積容量

About 集積容量

, 
加速度計

About 加速度計


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