Art
J-GLOBAL ID：200902009708043884   Reference number：91A0781086

Dry surface cleaning using CO2 snow.

CO2雪を用いた乾式表面洗浄法
Author (3)：
SHERMAN R

About SHERMAN R

(BOC Group, New Jersey)

About BOC Group, New Jersey

, 
GROB J

About GROB J

(BOC Group, New Jersey)

About BOC Group, New Jersey

, 
WHITLOCK W

About WHITLOCK W

(BOC Group, New Jersey)

About BOC Group, New Jersey


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 9  Issue： 4  Page： 1970-1977  Publication year： Jul. 1991 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
cleaning (washing)

About cleaning (washing)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Techniques for samples 
(BA02070O)

About Techniques for samples

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
CO2

About CO2

, 
雪

About 雪

, 
表面洗浄

About 表面洗浄


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