Characterization of Automatic Overlay Measurement Technique for Sub-Half Micron Devices.

KAWAI A; FUJIWARA K; TSUJITA K; NAGATA H

Art

J-GLOBAL ID：200902009788432150 Reference number：91A0908522

Characterization of Automatic Overlay Measurement Technique for Sub-Half Micron Devices.

Publisher site Copy service {{ this.onShowCLink("http://jdream3.com/copy/?sid=JGLOBAL&noSystem=1&documentNoArray=91A0908522&COPY=1") }}
Access JDreamⅢ for advanced search and analysis. {{ this.onShowJLink("http://jdream3.com/lp/jglobal/index.html?docNo=91A0908522&from=J-GLOBAL&jstjournalNo=D0943A") }}

Author (4)： , , ,
Material：
Volume： 1464 Page： 267-277 Publication year： 1991
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

Return to Previous Page