Art
J-GLOBAL ID：200902011134290327
Reference number：90A0896103
Silent discharges for the generation of ultraviolet and vacuum ultraviolet excimer radiation.
紫外線発生のための無音放電と真空紫外エキサイマ照射
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Author (1)：
Material：
Volume：
62
Issue：
9
Page：
1667-1674
Publication year：
Sep. 1990
JST Material Number：
H0385A
ISSN：
0033-4545
CODEN：
PACHAS
Document type：
Article
Article type：
原著論文
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Gas discharges
, Visible and ultraviolet spectra of molecules in general
Terms in the title (3)：
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