Art
J-GLOBAL ID：200902014668995562   Reference number：90A0171793

A compact self-shielding prober for accurate measurement of on-wafer electron devices.

ウェハ上電子デバイスの精密測定のためのコンパクトな自己シールド形検査器
Author (1)：
YAMAMOTO Y

About YAMAMOTO Y

(NTT LSI Lab., Kanagawa, JPN)

About NTT LSI Lab., Kanagawa, JPN


Material：
IEEE Transactions on Instrumentation and Measurement  (IEEE Trans Instrum Meas)

About IEEE Transactions on Instrumentation and Measurement


Volume： 38  Issue： 6  Page： 1088-1093  Publication year： Dec. 1989 
JST Material Number： C0232A  ISSN： 0018-9456  CODEN： IEIMAO  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
wafer

About wafer

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of current,voltage,charge 
(AD07020C)

About Measuring methods and instruments of current,voltage,charge

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
ウェハ

About ウェハ

, 
電子デバイス

About 電子デバイス

, 
精密測定

About 精密測定

, 
自己

About 自己

, 
シールド

About シールド

, 
検査

About 検査


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