A new VLSI diagnosis technique: Focused ion beam assisted multi-level circuit probing.

MASHIKO Y; MORIMOTO H; KOYAMA H; KAWAZU S; KAITO T; ADACHI T

Art

J-GLOBAL ID：200902014742067036 Reference number：88A0014059

A new VLSI diagnosis technique: Focused ion beam assisted multi-level circuit probing.

新しい超LSI診断技術集束イオンビームによる多層配線回路プロービング

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Author (6)： , , , , ,
Material：
Volume： 25th Page： 111-117 Publication year： 1987
JST Material Number： A0631A ISSN： 1541-7026 Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Measurement,testing and reliability of solid-state devices , Semiconductor integrated circuit

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