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J-GLOBAL ID:200902016356330698   Reference number:87A0184710

Straightness measurement using a heterodyne moir<span style=text-decoration:overline>e ́</span> method.

ヘテロダインモアレ法を用いた真直度測定
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Volume:Issue:Page: 19-22  Publication year: Jan. 1987 
JST Material Number: A0734B  ISSN: 0141-6359  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Other optical instruments and techniques 
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