Microfabrication of cantilever styli for the atomic force microscope.

ALBRECHT T R; AKAMINE S; CARVER T E; QUATE C F

Art

J-GLOBAL ID：200902016540244036 Reference number：90A0742584

Microfabrication of cantilever styli for the atomic force microscope.

原子間力顕微鏡のための片持ち梁針の微細加工

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Author (4)： , , ,
Material：
Volume： 8 Issue： 4 Page： 3386-3396 Publication year： Jul. 1990
JST Material Number： C0789B ISSN： 0734-2101 CODEN： JVTAD6 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Microscopy determination of structures

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