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J-GLOBAL ID:200902017222631116   Reference number:91A0195653

Micromechanical fracture strength of silicon.

Siのミクロな機械的破壊強度
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Volume: 68  Issue: 11  Page: 5840-5844  Publication year: Dec. 01, 1990 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Mechanical properties of solids in general  ,  Manufacturing technology of solid-state devices 
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