A Multistep Anisotropic Etching Process for Producing 3-D Silicon Accelerometers.

KOIDE A; SATO K; SUZUKI S; MIKI M

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J-GLOBAL ID：200902017750902563 Reference number：92A0634419

A Multistep Anisotropic Etching Process for Producing 3-D Silicon Accelerometers.

三次元シリコン加速度計製造用の多段階異方性エッチングプロセス

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Material：
Volume： 11th Page： 23-26 Publication year： May. 1992
JST Material Number： X0768A Document type： Proceedings
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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