Art
J-GLOBAL ID:200902017859063855
Reference number:87A0428715
Rarefied gas dynamics problems on fabrication processes of semiconductor films.
半導体膜の製造過程に関する希薄気体力学的問題
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Author (1):
Material:
Page:
410-419
Publication year:
1986
JST Material Number:
K19870312
ISBN:
3-519-02622-8
Document type:
Proceedings
Article type:
原著論文
Country of issue:
Germany, Federal Republic of (DEU)
Language:
ENGLISH (EN)
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JST classification (2):
JST classification
Category name(code) classified by JST.
Rarefied gas dynamics
, Techniques and equipment of thin film deposition
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