Art
J-GLOBAL ID：200902018280880521   Reference number：91A0891071

Special Issue on Ultra-precision Positioning Technologies. The Existing Condition of Techniques of Precise and Ultra-precise Positioning.

特集 超精密位置決め技術の現状 総論: 精密および超精密位置決め技術の現状
Author (1)：
IZAWA MINORU

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(明治大理工)

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Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 57  Issue： 10  Page： 1707-1716  Publication year： Oct. 1991 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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thermal deformation

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Machine tool elements,jigs,chucks 
(QC01020Z)

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Reference (2)：
  • 1) 井澤 實 : 超精密位置決めの現状と将来, 昭和63年度精密工学会春季大会シンポジウム資料, (1988) 47.
  • 2) 井澤 實 : 精密位置決め技術, 工業調査会, (1989) 13.
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精密位置決め

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現状

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