Art
J-GLOBAL ID：200902018382199764   Reference number：90A0085203

CD measuring technology supporting micro engineering.

ミクロ化技術を支える微小寸法測定技術
Author (1)：
TAKAHASHI YUJI

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(日立電子)

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Material：
日本機械学会誌  (Journal of the Japan Society of Mechanical Engineers)

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Volume： 92  Issue： 853  Page： 1034-1038  Publication year： Dec. 1989 
JST Material Number： F0228A  ISSN： 0021-4728  CODEN： NKGKA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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length measurement

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

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Terms in the title (2)：
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微小

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, 
寸法測定

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