Sensitivity enhancers for chemically amplified resists.

BRUNSVOLD W; KWONG R; MONTGOMERY W; MOREAU W; SACHDEV H; WELSH K

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J-GLOBAL ID：200902018696817667 Reference number：90A0804461

Sensitivity enhancers for chemically amplified resists.

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Author (6)： , , , , ,
Material：
Volume： 1262 Page： 162-169 Publication year： 1990
JST Material Number： D0943A ISSN： 0277-786X CODEN： PSISDG Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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