Art
J-GLOBAL ID：200902018934571469   Reference number：84A0440095

エレクトロニクスにおける微細加工技術の展望と波及効果

Author (2)：
TAKANASHI AKIHIRO

About TAKANASHI AKIHIRO

(日立中研)

About 日立中研

, 
SATO KAZUO

About SATO KAZUO

(日立中研試作部)

About 日立中研試作部


Material：
電子技術  (Electronic Engineering)

About 電子技術


Volume： 26  Issue： 9  Page： 18-24  Publication year： Aug. 1984 
JST Material Number： F0571A  ISSN： 0366-8819  CODEN： DEGIA  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
LSI

About LSI

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
メカニズム

About メカニズム

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=84A0440095&from=J-GLOBAL&jstjournalNo=F0571A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Machine elements in general 
(QB01010L)

About Machine elements in general

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
エレクトロニクス

About エレクトロニクス

, 
微細加工技術

About 微細加工技術

, 
展望

About 展望

, 
波及効果

About 波及効果


Return to Previous Page

TOP

BOTTOM