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J-GLOBAL ID:200902018934571469   Reference number:84A0440095

エレクトロニクスにおける微細加工技術の展望と波及効果

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Volume: 26  Issue:Page: 18-24  Publication year: Aug. 1984 
JST Material Number: F0571A  ISSN: 0366-8819  CODEN: DEGIA  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Machine elements in general 
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