Art
J-GLOBAL ID：200902021107956629   Reference number：90A0638053

Electrostatic-comb drive of lateral polysilicon resonators.

多結晶横方向共振器の静電型くしの駆動
Author (4)：
TANG W C

About TANG W C

(Univ. California at Berkeley, CA, USA)

About Univ. California at Berkeley, CA, USA

, 
NGUYEN T-C

About NGUYEN T-C

(Univ. California at Berkeley, CA, USA)

About Univ. California at Berkeley, CA, USA

, 
JUDY M W

About JUDY M W

(Univ. California at Berkeley, CA, USA)

About Univ. California at Berkeley, CA, USA

, 
HOWE R T

About HOWE R T

(Univ. California at Berkeley, CA, USA)

About Univ. California at Berkeley, CA, USA


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： 21  Issue： 1/3  Page： 328-331  Publication year： Feb. 1990 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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polycrystal

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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characterization

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Resonator 
(NC04050Y)

About Resonator

,  Excitation,generation and measurements of vibrations 
(BB02030Z)

About Excitation,generation and measurements of vibrations

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
多結晶

About 多結晶

, 
横方向

About 横方向

, 
共振器

About 共振器


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