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J-GLOBAL ID：200902022832168772   Reference number：84A0217260

IR study of amorphous silicon nitride films.

アモルファス窒化けい素のIR研究
Author (1)：
LUONGO J P

About LUONGO J P

(Bell Lab., New Jersey)

About Bell Lab., New Jersey


Material：
Applied Spectroscopy  (Appl Spectrosc)

About Applied Spectroscopy


Volume： 38  Issue： 2  Page： 195-199  Publication year： Mar. 1984 
JST Material Number： A0429A  ISSN： 0003-7028  CODEN： APSPA  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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amorphous state

About amorphous state

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Infrared spectra,Raman scattering and Raman spectra of inorganic compounds 
(BM08063C)

About Infrared spectra,Raman scattering and Raman spectra of inorganic compounds

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
アモルファス

About アモルファス

, 
窒化けい素

About 窒化けい素

, 
Ir

About Ir

, 
研究

About 研究


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