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J-GLOBAL ID:200902025757522220   Reference number:91A0387736

Coating of steel by plasma-activated metal-organic chemical vapour deposition in the Si-C system.

Si-C系におけるプラズマ活性化有機金属化学蒸着による鋼の被膜
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Volume: 197  Issue: 1/2  Page: 257-267  Publication year: Mar. 10, 1991 
JST Material Number: B0899A  ISSN: 0040-6090  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Vapor plating 
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