Art
J-GLOBAL ID：200902025757522220   Reference number：91A0387736

Coating of steel by plasma-activated metal-organic chemical vapour deposition in the Si-C system.

Si-C系におけるプラズマ活性化有機金属化学蒸着による鋼の被膜
Author (2)：
LELOGEAIS M

About LELOGEAIS M

(Univ. Perpignan, FRA)

About Univ. Perpignan, FRA

, 
DUCARROIR M

About DUCARROIR M

(Univ. Perpignan, FRA)

About Univ. Perpignan, FRA


Material：
Thin Solid Films

About Thin Solid Films


Volume： 197  Issue： 1/2  Page： 257-267  Publication year： Mar. 10, 1991 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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Steel

About Steel

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Vapor plating 
(WC08022K)

About Vapor plating

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si

, 
プラズマ

About プラズマ

, 
活性化

About 活性化

, 
有機金属化学蒸着

About 有機金属化学蒸着

, 
鋼

About 鋼

, 
被膜

About 被膜


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