Art
J-GLOBAL ID：200902026055643807   Reference number：81A0422626

ZnO/SiO2-diaphragm composite resonator on a silicon wafer.

シリコンウエハ上に形成したZnO/SiO2隔膜複合共振器
Author (3)：
NAKAMURA K

About NAKAMURA K

(Tohoku Univ.)

About Tohoku Univ.

, 
SASAKI H

About SASAKI H

(Tohoku Univ.)

About Tohoku Univ.

, 
SHIMIZU H

About SHIMIZU H

(Tohoku Univ.)

About Tohoku Univ.


Material：
Electronics Letters  (Electron Lett)

About Electronics Letters


Volume： 17  Issue： 14  Page： 507-509  Publication year： Jul. 09, 1981 
JST Material Number： A0887A  ISSN： 0013-5194  CODEN： ELLEAK  Document type： Article
Article type： 短報  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
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partition wall

About partition wall

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
diaphragm

About diaphragm


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Resonator 
(NC04050Y)

About Resonator

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
シリコンウエハ

About シリコンウエハ

, 
ZnO

About ZnO

, 
SiO2

About SiO2

, 
隔膜

About 隔膜

, 
共振器

About 共振器


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