Art
J-GLOBAL ID:200902026055643807   Reference number:81A0422626

ZnO/SiO2-diaphragm composite resonator on a silicon wafer.

シリコンウエハ上に形成したZnO/SiO2隔膜複合共振器
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Material:
Volume: 17  Issue: 14  Page: 507-509  Publication year: Jul. 09, 1981 
JST Material Number: A0887A  ISSN: 0013-5194  CODEN: ELLEAK  Document type: Article
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Resonator 
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