Plasma immersion ion implantation using plasmas generated by radio frequency techniques.

TENDYS J; DONNELLY I J; KENNY M J; POLLOCK J T A

Art

J-GLOBAL ID：200902026717193980 Reference number：89A0273423

Plasma immersion ion implantation using plasmas generated by radio frequency techniques.

高周波法で発生させたプラズマを用いたプラズマ中イオン注入

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Material：
Volume： 53 Issue： 22 Page： 2143-2145 Publication year： Nov. 28, 1988
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Irradiational changes of metals , Surface hardening

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