Art
J-GLOBAL ID：200902028271533598
Reference number：88A0056856
Step height measurement using two-wavelength phase-shifting interferometry.
2波長位相シフト干渉計測を用いるステップ高さの測定
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Author (1)：
Material：
Volume：
26
Issue：
14
Page：
2810-2816
Publication year：
Jul. 15, 1987
JST Material Number：
B0026B
ISSN：
1559-128X
CODEN：
APOPAI
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Interferometry and interferometers
Terms in the title (4)：
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