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J-GLOBAL ID：200902028592162990   Reference number：85A0221073

Metallization. Problems related to refined contact.

メタライゼーション 微細コンタクトの諸問題
Author (1)：
KASHIWAGI MASAHIRO

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(東芝超LSI研)

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Material：
月刊Semiconductor World  (月刊セミコンダクターワールド)

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Volume： 4  Issue： 3  Page： 104-110  Publication year： Mar. 1985 
JST Material Number： Y0509A  ISSN： 0286-5025  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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metallization (IC)

About metallization (IC)

,...
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random access memory

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Manufacturing technology of solid-state devices 
(NC03030V)

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メタライゼーション

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微細

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コンタクト

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問題

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