Art
J-GLOBAL ID：200902030620748682   Reference number：91A0724006

New Mechanism and Dynamic Control Method of Micro Electrostatic Actuator with Three Degrees of Freedom.

3自由度マイクロ静電型アクチュエータの新機構及び動的制御方法
Author (2)：
FUKUDA T

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(Nagoya Univ., Nagoya, JPN)

About Nagoya Univ., Nagoya, JPN

, 
TANAKA T

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(Univ. Tokyo, Tokyo, JPN)

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Material：
Proceedings. IEEE International Conference on Robotics and Automation  (IEEE International Conference on Robotics and Automation)

About Proceedings. IEEE International Conference on Robotics and Automation


Volume： 1991  Issue： Vol.2  Page： 1610-1615  Publication year： 1991 
JST Material Number： T0044A  ISSN： 1050-4729  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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small type

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ロボット工学一般【’81~’92】 
(IC04010B)

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Terms in the title (4)：
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3自由度

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, 
マイクロ

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, 
アクチュエータ

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, 
動的制御

About 動的制御


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