Art
J-GLOBAL ID：200902031245262170   Reference number：91A0608968

Micromachined silicon sensors for scanning force microscopy.

走査型力顕微鏡用のシリコンセンサの微細加工
Author (3)：
WOLTER O

About WOLTER O

(IBM Germany, Sindelfingen, DEU)

About IBM Germany, Sindelfingen, DEU

, 
BAYER T

About BAYER T

(IBM Germany, Sindelfingen, DEU)

About IBM Germany, Sindelfingen, DEU

, 
GRESCHNER J

About GRESCHNER J

(IBM Germany, Sindelfingen, DEU)

About IBM Germany, Sindelfingen, DEU


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 9  Issue： 2 Pt 2  Page： 1353-1357  Publication year： Mar. 1991 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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microscope

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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SFM

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
走査型力顕微鏡

About 走査型力顕微鏡

, 
シリコン

About シリコン

, 
微細加工

About 微細加工


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