Art
J-GLOBAL ID：200902031407658617   Reference number：82A0184010

Structural investigation of thin films of diamondlike carbon.

ダイヤモンド様炭素薄膜の構造の研究
Author (2)：
VORA H

About VORA H

(Honeywell, Minnesota)

About Honeywell, Minnesota

, 
MORAVEC T J

About MORAVEC T J

(Honeywell, Minnesota)

About Honeywell, Minnesota


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 52  Issue： 10  Page： 6151-6157  Publication year： Oct. 1981 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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Carbon

About Carbon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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methane

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,...
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JST classification (1)：
JST classification
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Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (3)：
Terms in the title
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ダイヤモンド様炭素

About ダイヤモンド様炭素

, 
薄膜

About 薄膜

, 
研究

About 研究


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