Art
J-GLOBAL ID：200902032941745645   Reference number：88A0060593

The effect of low pressure on the structure of LPCVD polycrystalline silicon films.

LPCVD多結晶シリコン皮膜の構造に対する低圧の影響
Author (4)：
JOUBERT P

About JOUBERT P

(Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA)

About Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA

, 
LOISEL B

About LOISEL B

(Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA)

About Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA

, 
CHOUAN Y

About CHOUAN Y

(Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA)

About Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA

, 
HAJI L

About HAJI L

(Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA)

About Centre National d’<span style=text-decoration:overline>E ́</span>tudes des T<span style=text-decoration:overline>e ́</span>l<span style=text-decoration:overline>e ́</span>communications, Lannion, FRA


Material：
Journal of the Electrochemical Society  (J Electrochem Soc)

About Journal of the Electrochemical Society


Volume： 134  Issue： 10  Page： 2541-2545  Publication year： Oct. 1987 
JST Material Number： C0285A  ISSN： 1945-7111  CODEN： JESOAN  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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silicon

About silicon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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pressure dependence

About pressure dependence


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
LPCVD

About LPCVD

, 
多結晶シリコン

About 多結晶シリコン

, 
皮膜

About 皮膜

, 
低圧

About 低圧


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