Art
J-GLOBAL ID：200902034900699607
Reference number：89A0558751
Temporally resolved laser diagnostic measurements of atomic hydrogen concentrations in RF plasma discharges.
RFプラズマ放電中での原子状水素濃度の時間分解レーザ診断測定
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Author (4)：
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Material：
Volume：
9
Issue：
2
Page：
157-164
Publication year：
Jun. 1989
JST Material Number：
H0836A
ISSN：
0272-4324
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages
, Gas discharges
Terms in the title (5)：
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