Art
J-GLOBAL ID:200902035212308919   Reference number:91A0900602

Optical Spot Displacement Type Surface Profile Sensor.

光点変位型表面形状センサ
Author (4):
Material:
Volume: 74  Issue: 10  Page: 364-366  Publication year: Oct. 1991 
JST Material Number: S0623B  ISSN: 0915-1893  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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JST classification (1):
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Measuring methods and instruments of length,area,cross section,volume,angle 
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