Art
J-GLOBAL ID：200902037026826384   Reference number：83A0126779

Laser enhanced etching in KOH.

KOH内でのレーザによって強められたエッチング
Author (2)：
Von GUTFELD R J

About Von GUTFELD R J

(IBM, New York)

About IBM, New York

, 
HODGSON R T

About HODGSON R T

(IBM, New York)

About IBM, New York


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 40  Issue： 4  Page： 352-354  Publication year： Feb. 15, 1982 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
electron microscopy

About electron microscopy

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=83A0126779&from=J-GLOBAL&jstjournalNo=H0613A") }}
JST classification (3)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Techniques for samples 
(BA02070O)

About Techniques for samples

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
KOH

About KOH

, 
レーザ

About レーザ

, 
エッチング

About エッチング


Return to Previous Page

TOP

BOTTOM