Art
J-GLOBAL ID：200902037382162369   Reference number：87A0077536

A real time image processing algorithm for visual inspection of semiconductor wafer patterns.

実時間半導体ウエハ外観検査アルゴリズム
Author (3)：
SAKO HIROSHI

About SAKO HIROSHI

(日立 中研)

About 日立 中研

, 
YODA HARUO

About YODA HARUO

(日立 中研)

About 日立 中研

, 
EJIRI MASAKAZU

About EJIRI MASAKAZU

(日立 中研)

About 日立 中研


Material：
電子通信学会論文誌 D  (Transactions of the Institute of Electronics and Communication Engineers of Japan. D)

About 電子通信学会論文誌 D


Volume： 69  Issue： 11  Page： 1687-1696  Publication year： Nov. 1986 
JST Material Number： S0757A  ISSN： 0374-468X  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
semiconductor integrated circuit

About semiconductor integrated circuit

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=87A0077536&from=J-GLOBAL&jstjournalNo=S0757A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

,  Pattern recognition 
(JE07000S)

About Pattern recognition

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
実時間

About 実時間

, 
半導体ウエハ

About 半導体ウエハ

, 
外観検査

About 外観検査

, 
アルゴリズム

About アルゴリズム


Return to Previous Page

TOP

BOTTOM