Art

J-GLOBAL ID：200902039178702187   Reference number：93A0159492

Process integration of the ferroelectric memory FETs(FEMFETs) for NDRO FERRAM.

Author (9)： LAMPE D R (Westinghouse Electric Corp.) ,  ADAMS D A (Westinghouse Electric Corp.) ,  AUSTIN M (Westinghouse Electric Corp.) ,  POLINSKY M (Westinghouse Electric Corp.) ,  DZIMIANSKI J (Westinghouse Electric Corp.) ,  SINHAROY S (Westinghouse Electric Corp.) ,  BUHAY H (Westinghouse Electric Corp.) ,  BRABANT P (Westinghouse Electric Corp.) ,  LIU Y M (Westinghouse Electric Corp.)
Material： Ferroelectrics
Volume： 133  Issue： 1/4  Page： 61-72  Publication year： Aug. 1992 
JST Material Number： D0777A  ISSN： 0015-0193  CODEN： FEROA8  Document type： Article
Country of issue： United States (USA)  Language： ENGLISH (EN)