Art
J-GLOBAL ID：200902039461476827   Reference number：89A0415444

The relationship between residual stress, X-ray elastic constants and lattice parameters in TiN films made by physical vapor deposition.

物理蒸着TiN膜における残留応力,X線弾性定数,格子パラメータ間の相関関係
Author (1)：
PERRY A J

About PERRY A J

(GTE Valenite Corp., MI, USA)

About GTE Valenite Corp., MI, USA


Material：
Thin Solid Films

About Thin Solid Films


Volume： 170  Issue： 1  Page： 63-70  Publication year： Mar. 01, 1989 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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nitride

About nitride

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Mechanical properties of solids in general 
(BL01021C)

About Mechanical properties of solids in general

,  X-ray diffraction methods 
(BK01020I)

About X-ray diffraction methods

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
物理蒸着

About 物理蒸着

, 
TiN膜

About TiN膜

, 
残留応力

About 残留応力

, 
X線

About X線

, 
弾性定数

About 弾性定数

, 
格子パラメータ

About 格子パラメータ

, 
相関関係

About 相関関係


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