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J-GLOBAL ID:200902040821810349   Reference number:89A0189589

Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses.

フェムト秒UVエキシマレーザパルスによるポリテトラフルオロエチレン(テフロン)のアブレーション
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Material:
Volume: 54  Issue:Page: 4-6  Publication year: Jan. 02, 1989 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 

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