Art
J-GLOBAL ID:200902040900736022   Reference number:89A0562196

Plasma assisted CVD of TiS2.

TiS2のプラズマ援助CVD
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Volume: 49  Issue:Page: 105-109  Publication year: Jul. 1989 
JST Material Number: D0256C  ISSN: 0947-8396  CODEN: APHYCC  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Secondary batteries 
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