Art
J-GLOBAL ID：200902041896071610
Reference number：92A0142781
Shallow-Junction Formation on Silicon by Rapid Thermal Diffusion Impurities from a Spin-on Source.
スピンオン源からの不純物の急速熱拡散によるシリコン上への浅い接合の形成
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Author (4)：
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Material：
Volume：
39
Issue：
1
Page：
105-110
Publication year：
Jan. 1992
JST Material Number：
C0222A
ISSN：
0018-9383
CODEN：
IETDAI
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Diffusion in solids in general
, Photodetectors
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
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