Art
J-GLOBAL ID：200902044055712548   Reference number：92A0630113

Phase control of cubic boron nitride thin films.

立方晶窒化ほう素薄膜の相制御
Author (2)：
KESTER D J

About KESTER D J

(Pennsylvania State Univ., Pennsylvania)

About Pennsylvania State Univ., Pennsylvania

, 
MESSIER R

About MESSIER R

(Pennsylvania State Univ., Pennsylvania)

About Pennsylvania State Univ., Pennsylvania


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 72  Issue： 2  Page： 504-513  Publication year： Jul. 15, 1992 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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boron nitride

About boron nitride

,...
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JST classification (1)：
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Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (2)：
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立方晶窒化ほう素

About 立方晶窒化ほう素

, 
薄膜

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