Art
J-GLOBAL ID:200902044354538155   Reference number:82A0391863

Silicon as a mechanical material.

機械的材料としてのシリコン
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Volume: 70  Issue:Page: 420-457  Publication year: May. 1982 
JST Material Number: D0378A  ISSN: 0018-9219  CODEN: IEEPAD  Document type: Article
Article type: 解説  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Materials of solid-state devices  ,  Manufacturing technology of solid-state devices  ,  I/O units 
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