Art
J-GLOBAL ID：200902044529490266   Reference number：83A0163930

Laser-enhanced gas-surface chemistry: Basic processes and applications.

レーザ増強気体-表面化学 基礎過程と応用
Author (1)：
CHUANG T J

About CHUANG T J

(IBM, California)

About IBM, California


Material：
Journal of Vacuum Science & Technology  (J Vac Sci Technol)

About Journal of Vacuum Science & Technology


Volume： 21  Issue： 3  Page： 798-806  Publication year： Sep. 1982 
JST Material Number： C0789A  ISSN： 0022-5355  CODEN： JVSTAL  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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laser irradiation

About laser irradiation

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Laser irradiation effects and damages 
(BK16040S)

About Laser irradiation effects and damages

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
レーザ

About レーザ

, 
増強

About 増強

, 
気体

About 気体

, 
表面化学

About 表面化学

, 
基礎

About 基礎

, 
過程

About 過程

, 
応用

About 応用


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