Art
J-GLOBAL ID：200902046611046741   Reference number：81A0002675

Characterization of ZnO piezoelectric films prepared by rf planar-magnetron sputtering.

平板マグネトロン高周波スパッタで作製したZnO薄膜の特性
Author (3)：
YAMAMOTO T

About YAMAMOTO T

(Kyoto Univ.)

About Kyoto Univ.

, 
SHIOSAKI T

About SHIOSAKI T

(Kyoto Univ.)

About Kyoto Univ.

, 
KAWABATA A

About KAWABATA A

(Kyoto Univ.)

About Kyoto Univ.


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 51  Issue： 6  Page： 3113-3120  Publication year： Jun. 1980 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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zinc oxide

About zinc oxide

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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derietion from flatness

About derietion from flatness


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
平板

About 平板

, 
マグネトロン

About マグネトロン

, 
高周波スパッタ

About 高周波スパッタ

, 
作製

About 作製

, 
ZnO薄膜

About ZnO薄膜


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