Art

J-GLOBAL ID：200902053148450607   Reference number：87A0396243

Micro-diaphragm pressure sensor.

マイクロ振動膜圧力センサ

Author (6)： SUGIYAMA S (Toyota Central Research & Development Lab. Inc., Aichi, JPN) ,  SUZUKI T (Toyota Central Research & Development Lab. Inc., Aichi, JPN) ,  KAWAHATA K (Toyota Central Research & Development Lab. Inc., Aichi, JPN) ,  SHIMAOKA K (Toyota Central Research & Development Lab. Inc., Aichi, JPN) ,  TAKIGAWA M (Toyota Central Research & Development Lab. Inc., Aichi, JPN) ,  IGARASHI I (Toyota Central Research & Development Lab. Inc., Aichi, JPN)
Material： Technical Digest. International Electron Devices Meeting  (IEEE International Electron Devices Meeting)
Volume： 1986  Page： 184-187  Publication year： 1986 
JST Material Number： C0829B  ISSN： 0163-1918  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： sensor ,...

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JST classification (2)： Piezoelectric devices  (NC03110I) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (3)： マイクロ ,  振動膜 ,  圧力センサ