Art
J-GLOBAL ID：200902055613016296
Reference number：90A0606340
A micro chemical analyzing system integrated on a silicon wafer.
シリコンウエハ上に集積したマイクロ化学分析システム
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Author (3)：
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Material：
Page：
89-94
Publication year：
1990
JST Material Number：
K19900617
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Analytical instruments
Terms in the title (4)：
Terms in the title
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