Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor deposition.

NARAYAN J; TIWARI P; CHEN X; SINGH J; CHOWDHURY R; ZHELEVA T

Art

J-GLOBAL ID：200902055807392710 Reference number：92A0752445

Epitaxial growth of TiN films on (100) silicon substrates by laser physical vapor deposition.

レーザ物理蒸着による(100)シリコン基板上へのTiN膜のエピタキシャル成長

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Author (6)： , , , , ,
Material：
Volume： 61 Issue： 11 Page： 1290-1292 Publication year： Sep. 14, 1992
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds

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