Art
J-GLOBAL ID：200902057927930823   Reference number：92A0540609

Supercritical Fluids for Single Wafer Cleaning.

単一ウエーハ洗浄のための臨界超過液
Author (3)：
BOK E

About BOK E

(Integrated Automation, Badhoevedorp, NLD)

About Integrated Automation, Badhoevedorp, NLD

, 
KELCH D

About KELCH D

(Messma-Kelch Robot, Schorndorf, DEU)

About Messma-Kelch Robot, Schorndorf, DEU

, 
SCHUMACHER K S

About SCHUMACHER K S

(S&K Products International Inc., New York)

About S&K Products International Inc., New York


Material：
Solid State Technology  (Solid State Technol)

About Solid State Technology


Volume： 35  Issue： 6  Page： 117-120  Publication year： Jun. 1992 
JST Material Number： E0226A  ISSN： 0038-111X  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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fluid

About fluid

,...
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JST classification (1)：
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Materials of solid-state devices 
(NC03020K)

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Terms in the title (3)：
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ウエーハ

About ウエーハ

, 
洗浄

About 洗浄

, 
臨界超過

About 臨界超過


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